GISAXS experiments on Al-coated Si-Wafers with expected “hillocks”

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GISAXS experiments on Al-coated Si-Wafers with expected “hillocks”. / Görgl, Richard; Dehm, Gerhard.
2006.

Research output: Book/ReportCommissioned reportTransferpeer-review

Bibtex - Download

@book{88ed4c31c47c417681b6049a4b74db30,
title = "GISAXS experiments on Al-coated Si-Wafers with expected “hillocks”",
author = "Richard G{\"o}rgl and Gerhard Dehm",
year = "2006",
language = "Deutsch",

}

RIS (suitable for import to EndNote) - Download

TY - BOOK

T1 - GISAXS experiments on Al-coated Si-Wafers with expected “hillocks”

AU - Görgl, Richard

AU - Dehm, Gerhard

PY - 2006

Y1 - 2006

M3 - Forschungsbericht

BT - GISAXS experiments on Al-coated Si-Wafers with expected “hillocks”

ER -