Characterization of silicon gate oxides by conducting atomic-force microscopy
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
Standard
Characterization of silicon gate oxides by conducting atomic-force microscopy. / Kremmer, S; Teichert, Christian; Pischler, E et al.
in: Surface and interface analysis, Jahrgang 33, 2002, S. 168-172 .
in: Surface and interface analysis, Jahrgang 33, 2002, S. 168-172 .
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
Harvard
Kremmer, S, Teichert, C, Pischler, E, Gold, H, Kuchar, F & Schatzmayr, M 2002, 'Characterization of silicon gate oxides by conducting atomic-force microscopy', Surface and interface analysis, Jg. 33, S. 168-172 . https://doi.org/10.1002/sia.1183
APA
Kremmer, S., Teichert, C., Pischler, E., Gold, H., Kuchar, F., & Schatzmayr, M. (2002). Characterization of silicon gate oxides by conducting atomic-force microscopy. Surface and interface analysis, 33, 168-172 . https://doi.org/10.1002/sia.1183
Vancouver
Kremmer S, Teichert C, Pischler E, Gold H, Kuchar F, Schatzmayr M. Characterization of silicon gate oxides by conducting atomic-force microscopy. Surface and interface analysis. 2002;33:168-172 . doi: 10.1002/sia.1183
Author
Bibtex - Download
@article{7ab935d582424b9294ad20998f48c68f,
title = "Characterization of silicon gate oxides by conducting atomic-force microscopy",
author = "S Kremmer and Christian Teichert and E Pischler and H Gold and Friedemar Kuchar and M Schatzmayr",
year = "2002",
doi = "10.1002/sia.1183",
language = "English",
volume = "33",
pages = "168--172 ",
journal = "Surface and interface analysis",
issn = "0142-2421",
publisher = "John Wiley & Sons, Gro{\ss}britannien",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Characterization of silicon gate oxides by conducting atomic-force microscopy
AU - Kremmer, S
AU - Teichert, Christian
AU - Pischler, E
AU - Gold, H
AU - Kuchar, Friedemar
AU - Schatzmayr, M
PY - 2002
Y1 - 2002
U2 - 10.1002/sia.1183
DO - 10.1002/sia.1183
M3 - Article
VL - 33
SP - 168
EP - 172
JO - Surface and interface analysis
JF - Surface and interface analysis
SN - 0142-2421
ER -
