Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

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Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons. / Panjan, Matjaz; Franz, Robert; Anders, A.
in: Plasma sources science & technology, Jahrgang 23, 2014, S. 0250071-02500712.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Vancouver

Panjan M, Franz R, Anders A. Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons. Plasma sources science & technology. 2014;23:0250071-02500712. doi: 10.1088/0963-0252/23/2/025007

Bibtex - Download

@article{6ed02a61b3e645519b7820655fa59cd5,
title = "Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons",
author = "Matjaz Panjan and Robert Franz and A. Anders",
year = "2014",
doi = "10.1088/0963-0252/23/2/025007",
language = "English",
volume = "23",
pages = "0250071--02500712",
journal = "Plasma sources science & technology",
issn = "0963-0252",
publisher = "IOP Publishing Ltd.",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons

AU - Panjan, Matjaz

AU - Franz, Robert

AU - Anders, A.

PY - 2014

Y1 - 2014

U2 - 10.1088/0963-0252/23/2/025007

DO - 10.1088/0963-0252/23/2/025007

M3 - Article

VL - 23

SP - 250071

EP - 2500712

JO - Plasma sources science & technology

JF - Plasma sources science & technology

SN - 0963-0252

ER -