A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Standard

A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films. / Matoy, K.; Schönherr, H.; Detzel, T. et al.
in: Thin solid films, Jahrgang 518, 2009, S. 247-256.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Harvard

Matoy, K, Schönherr, H, Detzel, T, Schöberl, T, Pippan, R, Motz, C & Dehm, G 2009, 'A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films', Thin solid films, Jg. 518, S. 247-256.

APA

Matoy, K., Schönherr, H., Detzel, T., Schöberl, T., Pippan, R., Motz, C., & Dehm, G. (2009). A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films. Thin solid films, 518, 247-256.

Vancouver

Matoy K, Schönherr H, Detzel T, Schöberl T, Pippan R, Motz C et al. A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films. Thin solid films. 2009;518:247-256.

Author

Matoy, K. ; Schönherr, H. ; Detzel, T. et al. / A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films. in: Thin solid films. 2009 ; Jahrgang 518. S. 247-256.

Bibtex - Download

@article{a7ef94f3548f422389c2585b219eff9c,
title = "A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films",
author = "K. Matoy and H. Sch{\"o}nherr and T. Detzel and Thomas Sch{\"o}berl and Reinhard Pippan and Christian Motz and Gerhard Dehm",
year = "2009",
language = "English",
volume = "518",
pages = "247--256",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films

AU - Matoy, K.

AU - Schönherr, H.

AU - Detzel, T.

AU - Schöberl, Thomas

AU - Pippan, Reinhard

AU - Motz, Christian

AU - Dehm, Gerhard

PY - 2009

Y1 - 2009

M3 - Article

VL - 518

SP - 247

EP - 256

JO - Thin solid films

JF - Thin solid films

SN - 0040-6090

ER -