TOF-SIMS depth profiling and element mapping on oxidized AlCrVN hard coatings

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Translated title of the contributionTOF-SIMS depth profiling and element mapping on oxidized AlCrVN hard coatings
Original languageEnglish
Pages (from-to)1857-1861
JournalAnalytical and bioanalytical chemistry
DOIs
Publication statusPublished - 2009