The effect of boron doping on thermal CVD of alumina

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Authors

  • M Penoy
  • C Michotte
  • H.-P. Martinz
  • Martin Kathrein

Details

Translated title of the contributionThe effect of boron doping on thermal CVD of alumina
Original languageEnglish
Title of host publicationproc. 17th International Plansee Seminar
Pages1-10
Publication statusPublished - 2009