Temperature dependence of in-plane stresses in sublayers of Al/AlN/Al2O3(0 0 0 1) structure
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| Translated title of the contribution | Temperature dependence of in-plane stresses in sublayers of Al/AlN/Al2O3(0 0 0 1) structure |
|---|---|
| Original language | English |
| Pages (from-to) | 119-123 |
| Journal | Journal of crystal growth |
| Volume | 262 |
| Publication status | Published - 2004 |
