Surface roughness reduction in Atomic Layer Epitaxy growth of titanium dioxide thin films
Research output: Contribution to journal › Article › Research › peer-review
Standard
Surface roughness reduction in Atomic Layer Epitaxy growth of titanium dioxide thin films. / Prohaska, Thomas; Ritala, M.; Leskelä, M. et al.
In: Thin solid films, 1994, p. 155-162.
In: Thin solid films, 1994, p. 155-162.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Prohaska, T, Ritala, M, Leskelä, M, Niinistö, L, FRIEDBACHER, G & GRASSERBAUER, M 1994, 'Surface roughness reduction in Atomic Layer Epitaxy growth of titanium dioxide thin films', Thin solid films, pp. 155-162.
APA
Prohaska, T., Ritala, M., Leskelä, M., Niinistö, L., FRIEDBACHER, G., & GRASSERBAUER, M. (1994). Surface roughness reduction in Atomic Layer Epitaxy growth of titanium dioxide thin films. Thin solid films, 155-162.
Vancouver
Prohaska T, Ritala M, Leskelä M, Niinistö L, FRIEDBACHER G, GRASSERBAUER M. Surface roughness reduction in Atomic Layer Epitaxy growth of titanium dioxide thin films. Thin solid films. 1994; 155-162.
Author
Bibtex - Download
@article{90cdefbe950c40d9bd0f41d48b430837,
title = "Surface roughness reduction in Atomic Layer Epitaxy growth of titanium dioxide thin films",
author = "Thomas Prohaska and M. Ritala and M. Leskel{\"a} and L. Niinist{\"o} and G FRIEDBACHER and M GRASSERBAUER",
year = "1994",
language = "English",
pages = " 155--162",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Surface roughness reduction in Atomic Layer Epitaxy growth of titanium dioxide thin films
AU - Prohaska, Thomas
AU - Ritala, M.
AU - Leskelä, M.
AU - Niinistö, L.
AU - FRIEDBACHER, G
AU - GRASSERBAUER, M
PY - 1994
Y1 - 1994
M3 - Article
SP - 155
EP - 162
JO - Thin solid films
JF - Thin solid films
SN - 0040-6090
ER -
