Surface roughness reduction in Atomic Layer Epitaxy growth of titanium dioxide thin films

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Standard

Surface roughness reduction in Atomic Layer Epitaxy growth of titanium dioxide thin films. / Prohaska, Thomas; Ritala, M.; Leskelä, M. et al.
In: Thin solid films, 1994, p. 155-162.

Research output: Contribution to journalArticleResearchpeer-review

Harvard

Prohaska, T, Ritala, M, Leskelä, M, Niinistö, L, FRIEDBACHER, G & GRASSERBAUER, M 1994, 'Surface roughness reduction in Atomic Layer Epitaxy growth of titanium dioxide thin films', Thin solid films, pp. 155-162.

APA

Prohaska, T., Ritala, M., Leskelä, M., Niinistö, L., FRIEDBACHER, G., & GRASSERBAUER, M. (1994). Surface roughness reduction in Atomic Layer Epitaxy growth of titanium dioxide thin films. Thin solid films, 155-162.

Vancouver

Prohaska T, Ritala M, Leskelä M, Niinistö L, FRIEDBACHER G, GRASSERBAUER M. Surface roughness reduction in Atomic Layer Epitaxy growth of titanium dioxide thin films. Thin solid films. 1994; 155-162.

Bibtex - Download

@article{90cdefbe950c40d9bd0f41d48b430837,
title = "Surface roughness reduction in Atomic Layer Epitaxy growth of titanium dioxide thin films",
author = "Thomas Prohaska and M. Ritala and M. Leskel{\"a} and L. Niinist{\"o} and G FRIEDBACHER and M GRASSERBAUER",
year = "1994",
language = "English",
pages = " 155--162",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Surface roughness reduction in Atomic Layer Epitaxy growth of titanium dioxide thin films

AU - Prohaska, Thomas

AU - Ritala, M.

AU - Leskelä, M.

AU - Niinistö, L.

AU - FRIEDBACHER, G

AU - GRASSERBAUER, M

PY - 1994

Y1 - 1994

M3 - Article

SP - 155

EP - 162

JO - Thin solid films

JF - Thin solid films

SN - 0040-6090

ER -