Structure, stresses and stress relaxation of TiN/Ag nanocomposite films
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Translated title of the contribution | Structure, stresses and stress relaxation of TiN/Ag nanocomposite films |
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Original language | English |
Pages (from-to) | 3606-3610 |
Journal | Journal of nanoscience and nanotechnology |
Volume | 9 |
Publication status | Published - 2009 |