Structural and mechanical evolution of reactively and non-reactively sputterd Zr-Al-N thin films during annealing

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Authors

Translated title of the contribution	Structural and mechanical evolution of reactively and non-reactively sputterd Zr-Al-N thin films during annealing
Original language	English
Pages (from-to)	52-56
Journal	Surface & coatings technology
Volume	244
DOIs	https://doi.org/10.1016/j.surfcoat.2014.01.049
Publication status	Published - 2014