Stress Factors and Absolute Residual Stresses in Thin Films Determined by the Combination of Curvature and sin2ψ Methods

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Translated title of the contributionStress Factors and Absolute Residual Stresses in Thin Films Determined by the Combination of Curvature and sin2ψ Methods
Original languageEnglish
Pages (from-to)711-715
JournalMaterials Science Forum
Volume524-525
Publication statusPublished - 2006