Stress Factors and Absolute Residual Stresses in Thin Films Determined by the Combination of Curvature and sin2ψ Methods
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Translated title of the contribution | Stress Factors and Absolute Residual Stresses in Thin Films Determined by the Combination of Curvature and sin2ψ Methods |
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Original language | English |
Pages (from-to) | 711-715 |
Journal | Materials Science Forum |
Volume | 524-525 |
Publication status | Published - 2006 |