Sputtered molybdenum films: structure and property evolution with film thickness
Research output: Contribution to journal › Article › Research › peer-review
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Sputtered molybdenum films: structure and property evolution with film thickness. / Hofer, Anna Maria; Schlacher, Josef; Keckes, Jozef et al.
In: Vacuum, Vol. 99, 2014, p. 149-152.
In: Vacuum, Vol. 99, 2014, p. 149-152.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Hofer, AM, Schlacher, J, Keckes, J, Winkler, J & Mitterer, C 2014, 'Sputtered molybdenum films: structure and property evolution with film thickness', Vacuum, vol. 99, pp. 149-152. https://doi.org/10.1016/j.vacuum.2013.05.018
APA
Hofer, A. M., Schlacher, J., Keckes, J., Winkler, J., & Mitterer, C. (2014). Sputtered molybdenum films: structure and property evolution with film thickness. Vacuum, 99, 149-152. https://doi.org/10.1016/j.vacuum.2013.05.018
Vancouver
Hofer AM, Schlacher J, Keckes J, Winkler J, Mitterer C. Sputtered molybdenum films: structure and property evolution with film thickness. Vacuum. 2014;99:149-152. doi: 10.1016/j.vacuum.2013.05.018
Author
Bibtex - Download
@article{87bf8d35900d4eacbd7f6318459619b2,
title = "Sputtered molybdenum films: structure and property evolution with film thickness",
author = "Hofer, {Anna Maria} and Josef Schlacher and Jozef Keckes and J{\"o}rg Winkler and Christian Mitterer",
year = "2014",
doi = "10.1016/j.vacuum.2013.05.018",
language = "English",
volume = "99",
pages = "149--152",
journal = "Vacuum",
issn = "0042-207X",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Sputtered molybdenum films: structure and property evolution with film thickness
AU - Hofer, Anna Maria
AU - Schlacher, Josef
AU - Keckes, Jozef
AU - Winkler, Jörg
AU - Mitterer, Christian
PY - 2014
Y1 - 2014
U2 - 10.1016/j.vacuum.2013.05.018
DO - 10.1016/j.vacuum.2013.05.018
M3 - Article
VL - 99
SP - 149
EP - 152
JO - Vacuum
JF - Vacuum
SN - 0042-207X
ER -
