Sputtered molybdenum films: structure and property evolution with film thickness

Research output: Contribution to journal › Article › Research › peer-review

Authors

Translated title of the contribution	Sputtered molybdenum films: structure and property evolution with film thickness
Original language	English
Pages (from-to)	149-152
Journal	Vacuum
Volume	99
DOIs	https://doi.org/10.1016/j.vacuum.2013.05.018
Publication status	Published - 2014