Sputtered molybdenum films: structure and property evolution with film thickness
Research output: Contribution to journal › Article › Research › peer-review
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| Translated title of the contribution | Sputtered molybdenum films: structure and property evolution with film thickness |
|---|---|
| Original language | English |
| Pages (from-to) | 149-152 |
| Journal | Vacuum |
| Volume | 99 |
| DOIs | |
| Publication status | Published - 2014 |
