Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence Interferometry
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In: Sensors (Basel, Switzerland), Vol. 19.2019, No. 5, 1152, 07.03.2019.
Research output: Contribution to journal › Article › Research › peer-review
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TY - JOUR
T1 - Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence Interferometry
AU - Taudt, Christopher
AU - Nelsen, Bryan
AU - Rossegger, Elisabeth
AU - Schlögl, Sandra
AU - Koch, Edmund
AU - Hartmann, Peter
PY - 2019/3/7
Y1 - 2019/3/7
N2 - A method to characterize cross-linking differences in polymers such as waveguide polymers has been developed. The method is based on the scan-free information acquisition utilizing a low-coherence interferometer in conjunction with an imaging spectrometer. By the introduction of a novel analyzing algorithm, the recorded spectral-phase data was interpreted as wavelength-dependent optical thickness which is matchable with the refractive index and therefore with the degree of cross-linking. In the course of this work, the method was described in its hardware and algorithmic implementation as well as in its accuracy. Comparative measurements and error estimations showed an accuracy in the range of 10-6 in terms of the refractive index. Finally, photo-lithographically produced samples with laterally defined cross-linking differences have been characterized. It could be shown, that differences in the optical thickness of ±1.5 μm are distinguishable.
AB - A method to characterize cross-linking differences in polymers such as waveguide polymers has been developed. The method is based on the scan-free information acquisition utilizing a low-coherence interferometer in conjunction with an imaging spectrometer. By the introduction of a novel analyzing algorithm, the recorded spectral-phase data was interpreted as wavelength-dependent optical thickness which is matchable with the refractive index and therefore with the degree of cross-linking. In the course of this work, the method was described in its hardware and algorithmic implementation as well as in its accuracy. Comparative measurements and error estimations showed an accuracy in the range of 10-6 in terms of the refractive index. Finally, photo-lithographically produced samples with laterally defined cross-linking differences have been characterized. It could be shown, that differences in the optical thickness of ±1.5 μm are distinguishable.
KW - cross-linking characterization
KW - dispersion-enhanced low-coherence interferometry
KW - interferometry
KW - photoresist
KW - semiconductor manufacturing
KW - white-light interferometry
UR - http://www.scopus.com/inward/record.url?scp=85062818031&partnerID=8YFLogxK
U2 - 10.3390/s19051152
DO - 10.3390/s19051152
M3 - Article
C2 - 30866475
AN - SCOPUS:85062818031
VL - 19.2019
JO - Sensors (Basel, Switzerland)
JF - Sensors (Basel, Switzerland)
SN - 1424-8220
IS - 5
M1 - 1152
ER -