TY - JOUR

T1 - Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence Interferometry

AU - Taudt, Christopher

AU - Nelsen, Bryan

AU - Rossegger, Elisabeth

AU - Schlögl, Sandra

AU - Koch, Edmund

AU - Hartmann, Peter

PY - 2019/3/7

Y1 - 2019/3/7

N2 - A method to characterize cross-linking differences in polymers such as waveguide polymers has been developed. The method is based on the scan-free information acquisition utilizing a low-coherence interferometer in conjunction with an imaging spectrometer. By the introduction of a novel analyzing algorithm, the recorded spectral-phase data was interpreted as wavelength-dependent optical thickness which is matchable with the refractive index and therefore with the degree of cross-linking. In the course of this work, the method was described in its hardware and algorithmic implementation as well as in its accuracy. Comparative measurements and error estimations showed an accuracy in the range of 10-6 in terms of the refractive index. Finally, photo-lithographically produced samples with laterally defined cross-linking differences have been characterized. It could be shown, that differences in the optical thickness of ±1.5 μm are distinguishable.

AB - A method to characterize cross-linking differences in polymers such as waveguide polymers has been developed. The method is based on the scan-free information acquisition utilizing a low-coherence interferometer in conjunction with an imaging spectrometer. By the introduction of a novel analyzing algorithm, the recorded spectral-phase data was interpreted as wavelength-dependent optical thickness which is matchable with the refractive index and therefore with the degree of cross-linking. In the course of this work, the method was described in its hardware and algorithmic implementation as well as in its accuracy. Comparative measurements and error estimations showed an accuracy in the range of 10-6 in terms of the refractive index. Finally, photo-lithographically produced samples with laterally defined cross-linking differences have been characterized. It could be shown, that differences in the optical thickness of ±1.5 μm are distinguishable.

KW - cross-linking characterization

KW - dispersion-enhanced low-coherence interferometry

KW - interferometry

KW - photoresist

KW - semiconductor manufacturing

KW - white-light interferometry

UR - http://www.scopus.com/inward/record.url?scp=85062818031&partnerID=8YFLogxK

U2 - 10.3390/s19051152

DO - 10.3390/s19051152

M3 - Article

C2 - 30866475

AN - SCOPUS:85062818031

VL - 19.2019

JO - Sensors (Basel, Switzerland)

JF - Sensors (Basel, Switzerland)

SN - 1424-8220

IS - 5

M1 - 1152

ER -