Kainz, C.,
Letofsky-Papst, I.,
Saringer, C.,
Krüger, H.,
Stark, A.,
Schell, N.,
Pohler, M. &
Czettl, C.,
1 Feb 2023, (E-pub ahead of print)
In: Journal of vacuum science & technology / A (JVST). 41.2023,
2,
10 p., 023102.
Research output: Contribution to journal › Article › Research › peer-review