Mitigating Focused Ion Beam Damage in Molybdenum Nanopillars by In Situ Annealing
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Translated title of the contribution | Mitigating Focused Ion Beam Damage in Molybdenum Nanopillars by In Situ Annealing |
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Original language | English |
Pages (from-to) | 1748-1749 |
Journal | Microscopy and microanalysis |
Volume | 16 |
DOIs | |
Publication status | Published - 2010 |