Microstructure related stress state in magnetron sputtered thin films
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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| Translated title of the contribution | Microstructure related stress state in magnetron sputtered thin films |
|---|---|
| Original language | English |
| Title of host publication | Proceedings E-MRS Spring Meeting |
| Pages | 25-25 |
| Publication status | Published - 2009 |
