Microstructure, mechanical and optical properties of TiAlON coatings sputter-deposited with varying oxygen partial pressures

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@article{c086cfc816324e1bac8c3dabe2883084,
title = "Microstructure, mechanical and optical properties of TiAlON coatings sputter-deposited with varying oxygen partial pressures",
author = "N. Schalk and {Simonet Fotso}, J.F.T. and D. Holec and A. Fian and G. Jakopic and V.L. Terziyska and R. Daniel and C. Mitterer",
year = "2015",
doi = "10.1088/0022-3727/49/2/025307",
language = "English",
journal = "Journal of physics / D, Applied physics",
issn = "0022-3727",
publisher = "IOP Publishing Ltd.",

}

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TY - JOUR

T1 - Microstructure, mechanical and optical properties of TiAlON coatings sputter-deposited with varying oxygen partial pressures

AU - Schalk, N.

AU - Simonet Fotso, J.F.T.

AU - Holec, D.

AU - Fian, A.

AU - Jakopic, G.

AU - Terziyska, V.L.

AU - Daniel, R.

AU - Mitterer, C.

PY - 2015

Y1 - 2015

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84950112652&partnerID=MN8TOARS

U2 - 10.1088/0022-3727/49/2/025307

DO - 10.1088/0022-3727/49/2/025307

M3 - Article

JO - Journal of physics / D, Applied physics

JF - Journal of physics / D, Applied physics

SN - 0022-3727

ER -