Microstructure, mechanical and optical properties of TiAlON coatings sputter-deposited with varying oxygen partial pressures
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In: Journal of physics / D, Applied physics, 2015.
Research output: Contribution to journal › Article › Research › peer-review
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TY - JOUR
T1 - Microstructure, mechanical and optical properties of TiAlON coatings sputter-deposited with varying oxygen partial pressures
AU - Schalk, N.
AU - Simonet Fotso, J.F.T.
AU - Holec, D.
AU - Fian, A.
AU - Jakopic, G.
AU - Terziyska, V.L.
AU - Daniel, R.
AU - Mitterer, C.
PY - 2015
Y1 - 2015
UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84950112652&partnerID=MN8TOARS
U2 - 10.1088/0022-3727/49/2/025307
DO - 10.1088/0022-3727/49/2/025307
M3 - Article
JO - Journal of physics / D, Applied physics
JF - Journal of physics / D, Applied physics
SN - 0022-3727
ER -