Microstructural and stress design of thin films - The journey from nitrides to oxides, from nanocrystalline to amorphous materials
Research output: Contribution to conference › Presentation › Research › peer-review
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Original language | English |
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Publication status | Published - 2014 |
Event | 72nd IUVSTA Workshop - Duration: 6 Apr 2014 → … |
Conference
Conference | 72nd IUVSTA Workshop |
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Period | 6/04/14 → … |