Investigation of fracture properties of magnetron-sputtered TiN films by means of a FIB-based cantilever bending technique
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
Details
| Translated title of the contribution | Investigation of fracture properties of magnetron-sputtered TiN films by means of a FIB-based cantilever bending technique |
|---|---|
| Original language | English |
| Pages (from-to) | 1768-1776 |
| Journal | Acta materialia |
| Volume | 57 |
| Publication status | Published - 2009 |
