Intrinsic stresses and stress relaxation in TiN/Ag multilayer coatings during thermal cycling

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Authors

Translated title of the contribution	Intrinsic stresses and stress relaxation in TiN/Ag multilayer coatings during thermal cycling
Original language	English
Pages (from-to)	1920-1924
Journal	Thin solid films
Volume	516
DOIs	https://doi.org/10.1016/j.tsf.2007.08.059
Publication status	Published - 2008