Interface fracture and chemistry of a tungsten-based metallization on borophosphosilicate glass

Research output: Contribution to journalArticleResearchpeer-review

Authors

  • W. Heinz
  • K. Matoy
  • R. Roth
  • J. M. Batke
  • T. Schöberl

External Organisational units

  • KAI - Kompetenzzentrum Automobil- und Industrieelektronik GmbH
  • Infineon Technologies AG Austria
  • Erich Schmid Institute of Materials Science
  • Ludwig-Maximilians-University
  • Max-Planck-Institut für Eisenforschung GmbH

Details

Original languageEnglish
Pages (from-to)1967-1981
Number of pages15
JournalPhilosophical magazine
Volume95
Issue number16-18
DOIs
Publication statusPublished - 23 Jun 2015