In-situ Observation of Cross- Sectional Microstructural Changes and Stress Distributions in Fracturing TiN Thin Film during Nanoindentation
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In: Scientific reports (London : Nature Publishing Group), Vol. 6:22670, 07.03.2016, p. 1-14.
Research output: Contribution to journal › Article › Research › peer-review
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TY - JOUR
T1 - In-situ Observation of Cross- Sectional Microstructural Changes and Stress Distributions in Fracturing TiN Thin Film during Nanoindentation
AU - Zeilinger, Angelika
AU - Todt, Juraj
AU - Krywka, C.
AU - Müller, Martin
AU - Ecker, Werner
AU - Sartory, Bernhard
AU - Meindlhumer, Michael
AU - Stefenelli, Mario
AU - Daniel, Rostislav
AU - Mitterer, Christian
AU - Keckes, Jozef
PY - 2016/3/7
Y1 - 2016/3/7
U2 - DOI: 10.1038/srep22670
DO - DOI: 10.1038/srep22670
M3 - Article
VL - 6:22670
SP - 1
EP - 14
JO - Scientific reports (London : Nature Publishing Group)
JF - Scientific reports (London : Nature Publishing Group)
SN - 2045-2322
ER -