In-situ Observation of Cross- Sectional Microstructural Changes and Stress Distributions in Fracturing TiN Thin Film during Nanoindentation

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In-situ Observation of Cross- Sectional Microstructural Changes and Stress Distributions in Fracturing TiN Thin Film during Nanoindentation. / Zeilinger, Angelika; Todt, Juraj; Krywka, C. et al.
In: Scientific reports (London : Nature Publishing Group), Vol. 6:22670, 07.03.2016, p. 1-14.

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@article{e9b014735d0e46e4a035e820e55a28b8,
title = "In-situ Observation of Cross- Sectional Microstructural Changes and Stress Distributions in Fracturing TiN Thin Film during Nanoindentation",
author = "Angelika Zeilinger and Juraj Todt and C. Krywka and Martin M{\"u}ller and Werner Ecker and Bernhard Sartory and Michael Meindlhumer and Mario Stefenelli and Rostislav Daniel and Christian Mitterer and Jozef Keckes",
year = "2016",
month = mar,
day = "7",
doi = "DOI: 10.1038/srep22670",
language = "English",
volume = "6:22670",
pages = "1--14",
journal = "Scientific reports (London : Nature Publishing Group)",
issn = "2045-2322",
publisher = "Nature Publishing Group",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - In-situ Observation of Cross- Sectional Microstructural Changes and Stress Distributions in Fracturing TiN Thin Film during Nanoindentation

AU - Zeilinger, Angelika

AU - Todt, Juraj

AU - Krywka, C.

AU - Müller, Martin

AU - Ecker, Werner

AU - Sartory, Bernhard

AU - Meindlhumer, Michael

AU - Stefenelli, Mario

AU - Daniel, Rostislav

AU - Mitterer, Christian

AU - Keckes, Jozef

PY - 2016/3/7

Y1 - 2016/3/7

U2 - DOI: 10.1038/srep22670

DO - DOI: 10.1038/srep22670

M3 - Article

VL - 6:22670

SP - 1

EP - 14

JO - Scientific reports (London : Nature Publishing Group)

JF - Scientific reports (London : Nature Publishing Group)

SN - 2045-2322

ER -