Influence of varying nitrogen partial pressures on microstructure, mechanical and optical properties of sputtered TiAlON coatings
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In: Acta materialia, No. 119, 2016, p. 26-34.
Research output: Contribution to journal › Article › Research › peer-review
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TY - JOUR
T1 - Influence of varying nitrogen partial pressures on microstructure, mechanical and optical properties of sputtered TiAlON coatings
AU - Schalk, Nina
AU - Simonet Fotso, Jules
AU - Holec, David
AU - Jakopic, Georg
AU - Fian, Alexander
AU - Terziyska, Velislava
AU - Daniel, Rostislav
AU - Mitterer, Christian
PY - 2016
Y1 - 2016
KW - TiAlON
KW - Sputtering
KW - XPS
KW - TEM
KW - Ellipsometry
U2 - http://dx.doi.org/10.1016/j.actamat.2016.08.007
DO - http://dx.doi.org/10.1016/j.actamat.2016.08.007
M3 - Article
SP - 26
EP - 34
JO - Acta materialia
JF - Acta materialia
SN - 1359-6454
IS - 119
ER -