Influence of varying nitrogen partial pressures on microstructure, mechanical and optical properties of sputtered TiAlON coatings

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@article{5eee9fb101de48c088880aeb60861c0d,
title = "Influence of varying nitrogen partial pressures on microstructure, mechanical and optical properties of sputtered TiAlON coatings",
keywords = "TiAlON, Sputtering, XPS, TEM, Ellipsometry",
author = "Nina Schalk and {Simonet Fotso}, Jules and David Holec and Georg Jakopic and Alexander Fian and Velislava Terziyska and Rostislav Daniel and Christian Mitterer",
year = "2016",
doi = "http://dx.doi.org/10.1016/j.actamat.2016.08.007",
language = "English",
pages = "26--34",
journal = "Acta materialia",
issn = "1359-6454",
publisher = "Elsevier",
number = "119",

}

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TY - JOUR

T1 - Influence of varying nitrogen partial pressures on microstructure, mechanical and optical properties of sputtered TiAlON coatings

AU - Schalk, Nina

AU - Simonet Fotso, Jules

AU - Holec, David

AU - Jakopic, Georg

AU - Fian, Alexander

AU - Terziyska, Velislava

AU - Daniel, Rostislav

AU - Mitterer, Christian

PY - 2016

Y1 - 2016

KW - TiAlON

KW - Sputtering

KW - XPS

KW - TEM

KW - Ellipsometry

U2 - http://dx.doi.org/10.1016/j.actamat.2016.08.007

DO - http://dx.doi.org/10.1016/j.actamat.2016.08.007

M3 - Article

SP - 26

EP - 34

JO - Acta materialia

JF - Acta materialia

SN - 1359-6454

IS - 119

ER -