Influence of hydrogen sulfide addition on the alumina deposition by plasma CVD

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Translated title of the contribution	Influence of hydrogen sulfide addition on the alumina deposition by plasma CVD
Original language	English
Pages (from-to)	360-363
Journal	Surface & coatings technology
Volume	200
DOIs	https://doi.org/10.1016/j.surfcoat.2005.02.069
Publication status	Published - 2005