Influence of hydrogen sulfide addition on the alumina deposition by plasma CVD
Research output: Contribution to journal › Article › Research › peer-review
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| Translated title of the contribution | Influence of hydrogen sulfide addition on the alumina deposition by plasma CVD |
|---|---|
| Original language | English |
| Pages (from-to) | 360-363 |
| Journal | Surface & coatings technology |
| Volume | 200 |
| DOIs | |
| Publication status | Published - 2005 |
