Improved nanoindentation methods for polymer based multilayer film cross-sections
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2023. Institute of Electrical and Electronics Engineers, 2023. (2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2023).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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TY - GEN
T1 - Improved nanoindentation methods for polymer based multilayer film cross-sections
AU - Christoefl, P.
AU - Jakes, J. E.
AU - Geier, J.
AU - Pinter, G.
AU - Oreski, G.
AU - Stone, D.
AU - Teichert, C.
N1 - Publisher Copyright: © 2023 IEEE.
PY - 2023
Y1 - 2023
UR - http://www.scopus.com/inward/record.url?scp=85158145947&partnerID=8YFLogxK
U2 - 10.1109/EuroSimE56861.2023.10100815
DO - 10.1109/EuroSimE56861.2023.10100815
M3 - Conference contribution
AN - SCOPUS:85158145947
T3 - 2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2023
BT - 2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2023
PB - Institute of Electrical and Electronics Engineers
T2 - 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2023
Y2 - 16 April 2023 through 19 April 2023
ER -