Hydrogen content in amorphous SiN
Research output: Contribution to journal › Article › Research › peer-review
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| Translated title of the contribution | Hydrogen content in amorphous SiN |
|---|---|
| Original language | English |
| Pages (from-to) | 49-52 |
| Journal | European semiconductor |
| Volume | 22 |
| Publication status | Published - 2000 |
