High-temperature tribological behavior of sputtered NbNx thin films

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Translated title of the contribution	High-temperature tribological behavior of sputtered NbNx thin films
Original language	English
Pages (from-to)	1017-1022
Journal	Surface & coatings technology
Volume	202
DOIs	https://doi.org/10.1016/j.surfcoat.2007.07.043
Publication status	Published - 2007