Evaluation of experimental stress-strain dependence in thermally cycled Al thin film on Si(100)
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- Materials Center Leoben Forschungs GmbH
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Translated title of the contribution | Evaluation of experimental stress-strain dependence in thermally cycled Al thin film on Si(100) |
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Original language | English |
Pages (from-to) | 367-371 |
Journal | Powder diffraction |
Volume | 19 |
Publication status | Published - 2004 |