Electromechanical properties of cathodic arc deposited high entropy alloy thin films on polymer substrates

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@article{e3d877b9788b4cd29900db98fdccae3c,
title = "Electromechanical properties of cathodic arc deposited high entropy alloy thin films on polymer substrates",
author = "Ao Xia and Oleksandr Glushko and Megan Cordill and Robert Franz",
year = "2018",
doi = "10.1116/1.5058729",
language = "English",
pages = "010601--1--010601--4",
journal = "Journal of vacuum science & technology / A (JVST)",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",

}

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TY - JOUR

T1 - Electromechanical properties of cathodic arc deposited high entropy alloy thin films on polymer substrates

AU - Xia, Ao

AU - Glushko, Oleksandr

AU - Cordill, Megan

AU - Franz, Robert

PY - 2018

Y1 - 2018

U2 - 10.1116/1.5058729

DO - 10.1116/1.5058729

M3 - Article

SP - 010601-1-010601-4

JO - Journal of vacuum science & technology / A (JVST)

JF - Journal of vacuum science & technology / A (JVST)

SN - 0734-2101

ER -