Effect of Grain Size on the Residual Stress State and Thermal Expansion in Magnetron Sputtered Thin Films
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
Authors
Organisational units
Details
| Translated title of the contribution | Effect of Grain Size on the Residual Stress State and Thermal Expansion in Magnetron Sputtered Thin Films |
|---|---|
| Original language | English |
| Title of host publication | Proceedings 37th International Conference on Metallurgical Coatings and Thin Films |
| Pages | 63-63 |
| Publication status | Published - 2010 |
