Data based modelling and identification of nonlinear SDOF MOEMS mirror
Research output: Contribution to conference › Paper › peer-review
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2019. Paper presented at MOEMS and Miniaturized Systems XVIII 2019, San Francisco, United States.
Research output: Contribution to conference › Paper › peer-review
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TY - CONF
T1 - Data based modelling and identification of nonlinear SDOF MOEMS mirror
AU - Brunner, David
AU - Yoo, Han Woong
AU - Thurner, Thomas
AU - Schitter, Georg
N1 - Publisher Copyright: © 2019 SPIE.
PY - 2019
Y1 - 2019
KW - Actuated decay
KW - Comb-drive torque
KW - Data based identification
KW - Generalized nonlinear SDOF model
KW - Micro-Opto-Electro-Mechanical System (MOEMS)
KW - Resonant scanning mirror
UR - http://www.scopus.com/inward/record.url?scp=85068070473&partnerID=8YFLogxK
U2 - 10.1117/12.2508429
DO - 10.1117/12.2508429
M3 - Paper
AN - SCOPUS:85068070473
T2 - MOEMS and Miniaturized Systems XVIII 2019
Y2 - 2 February 2019 through 4 February 2019
ER -