Data based modelling and identification of nonlinear SDOF MOEMS mirror
Research output: Contribution to conference › Paper › peer-review
Authors
External Organisational units
- Infineon Technologies Austria AG, Graz
- Institute of Materials Science and Technology
Details
Original language | English |
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DOIs | |
Publication status | Published - 2019 |
Externally published | Yes |
Event | MOEMS and Miniaturized Systems XVIII 2019 - San Francisco, United States Duration: 2 Feb 2019 → 4 Feb 2019 |
Conference
Conference | MOEMS and Miniaturized Systems XVIII 2019 |
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Country/Territory | United States |
City | San Francisco |
Period | 2/02/19 → 4/02/19 |