Correlating structural and mechanical properties of AlN / TiN superlattice films
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Authors
Organisational units
External Organisational units
- Erich Schmid Institute of Materials Science
- Institute of Materials Science and Technology
- Institute of Physics of Materials of the Academy of Sciences of the Czech Republic
- Masaryk University
- Brno University of Technology
Abstract
Combining first-principles and experimental techniques, we establish Young's modulus dependence of AlN/TiN superlattices on the film-forming phases, their thicknesses and crystallographic orientations. The disparate character of cleavage properties within different layers of the superlattice—providing indications regarding crack initiation processes—is linked to the changes in bond lengths. Such changes present a direct consequence of the predicted interplanar spacing oscillations which are experimentally confirmed by high resolution transmission electron microscopy analyses.
Details
Original language | English |
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Pages (from-to) | 159-163 |
Number of pages | 5 |
Journal | Scripta materialia |
Volume | 165.2019 |
Issue number | May |
DOIs | |
Publication status | Published - 1 May 2019 |