Correlating structural and mechanical properties of AlN / TiN superlattice films

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Correlating structural and mechanical properties of AlN / TiN superlattice films. / Koutná, Nikola; Rehák, Petr; Chen, Zhuo et al.
In: Scripta materialia, Vol. 165.2019, No. May, 01.05.2019, p. 159-163.

Research output: Contribution to journal › Article › Research › peer-review

Harvard

Koutná, N, Rehák, P, Chen, Z, Bartosik, M, Fallmann, M, Cerny, M, Zhang, Z, Friák, M, Šob, M, Mayrhofer, PH & Holec, D 2019, 'Correlating structural and mechanical properties of AlN / TiN superlattice films', Scripta materialia, vol. 165.2019, no. May, pp. 159-163. https://doi.org/10.1016/j.scriptamat.2019.02.021

APA

Koutná, N., Rehák, P., Chen, Z., Bartosik, M., Fallmann, M., Cerny, M., Zhang, Z., Friák, M., Šob, M., Mayrhofer, P. H., & Holec, D. (2019). Correlating structural and mechanical properties of AlN / TiN superlattice films. Scripta materialia, 165.2019(May), 159-163. https://doi.org/10.1016/j.scriptamat.2019.02.021

Vancouver

Koutná N, Rehák P, Chen Z, Bartosik M, Fallmann M, Cerny M et al. Correlating structural and mechanical properties of AlN / TiN superlattice films. Scripta materialia. 2019 May 1;165.2019(May):159-163. doi: 10.1016/j.scriptamat.2019.02.021

Author

Koutná, Nikola ; Rehák, Petr ; Chen, Zhuo et al. / Correlating structural and mechanical properties of AlN / TiN superlattice films. In: Scripta materialia. 2019 ; Vol. 165.2019, No. May. pp. 159-163.

Bibtex - Download

@article{ed56171eb0b14f0c993c2764680a904b,
title = "Correlating structural and mechanical properties of AlN / TiN superlattice films",
abstract = "Combining first-principles and experimental techniques, we establish Young's modulus dependence of AlN/TiN superlattices on the film-forming phases, their thicknesses and crystallographic orientations. The disparate character of cleavage properties within different layers of the superlattice—providing indications regarding crack initiation processes—is linked to the changes in bond lengths. Such changes present a direct consequence of the predicted interplanar spacing oscillations which are experimentally confirmed by high resolution transmission electron microscopy analyses.",
author = "Nikola Koutn{\'a} and Petr Reh{\'a}k and Zhuo Chen and Matthias Bartosik and Markus Fallmann and Miroslav Cerny and Zhaoli Zhang and Martin Fri{\'a}k and Mojm{\'i}r {\v S}ob and Mayrhofer, {Paul Heinz} and David Holec",
year = "2019",
month = may,
day = "1",
doi = "10.1016/j.scriptamat.2019.02.021",
language = "English",
volume = "165.2019",
pages = "159--163",
journal = "Scripta materialia",
issn = "1359-6462",
publisher = "Elsevier",
number = "May",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Correlating structural and mechanical properties of AlN / TiN superlattice films

AU - Koutná, Nikola

AU - Rehák, Petr

AU - Chen, Zhuo

AU - Bartosik, Matthias

AU - Fallmann, Markus

AU - Cerny, Miroslav

AU - Zhang, Zhaoli

AU - Friák, Martin

AU - Šob, Mojmír

AU - Mayrhofer, Paul Heinz

AU - Holec, David

PY - 2019/5/1

Y1 - 2019/5/1

N2 - Combining first-principles and experimental techniques, we establish Young's modulus dependence of AlN/TiN superlattices on the film-forming phases, their thicknesses and crystallographic orientations. The disparate character of cleavage properties within different layers of the superlattice—providing indications regarding crack initiation processes—is linked to the changes in bond lengths. Such changes present a direct consequence of the predicted interplanar spacing oscillations which are experimentally confirmed by high resolution transmission electron microscopy analyses.

AB - Combining first-principles and experimental techniques, we establish Young's modulus dependence of AlN/TiN superlattices on the film-forming phases, their thicknesses and crystallographic orientations. The disparate character of cleavage properties within different layers of the superlattice—providing indications regarding crack initiation processes—is linked to the changes in bond lengths. Such changes present a direct consequence of the predicted interplanar spacing oscillations which are experimentally confirmed by high resolution transmission electron microscopy analyses.

UR - http://www.scopus.com/inward/record.url?scp=85062233821&partnerID=8YFLogxK

U2 - 10.1016/j.scriptamat.2019.02.021

DO - 10.1016/j.scriptamat.2019.02.021

M3 - Article

VL - 165.2019

SP - 159

EP - 163

JO - Scripta materialia

JF - Scripta materialia

SN - 1359-6462

IS - May

ER -

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