Conductive Atomic-Force Microscopy Investigation of Nanostructures in Microelectronics

Research output: Chapter in Book/Report/Conference proceedingChapterResearch

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Conductive Atomic-Force Microscopy Investigation of Nanostructures in Microelectronics. / Teichert, Christian; Beinik, Igor.
Scanning Probe Microscopy in Nanoscience and Nanotechnology 2. 2011. p. 691-721.

Research output: Chapter in Book/Report/Conference proceedingChapterResearch

Vancouver

Teichert C, Beinik I. Conductive Atomic-Force Microscopy Investigation of Nanostructures in Microelectronics. In Scanning Probe Microscopy in Nanoscience and Nanotechnology 2. 2011. p. 691-721 doi: 10.1007/978-3-642-10497-8_23

Author

Teichert, Christian ; Beinik, Igor. / Conductive Atomic-Force Microscopy Investigation of Nanostructures in Microelectronics. Scanning Probe Microscopy in Nanoscience and Nanotechnology 2. 2011. pp. 691-721

Bibtex - Download

@inbook{fd465a50eb61437cb1465c09e48c2a0a,
title = "Conductive Atomic-Force Microscopy Investigation of Nanostructures in Microelectronics",
author = "Christian Teichert and Igor Beinik",
year = "2011",
doi = "10.1007/978-3-642-10497-8_23",
language = "English",
pages = "691--721",
booktitle = "Scanning Probe Microscopy in Nanoscience and Nanotechnology 2",

}

RIS (suitable for import to EndNote) - Download

TY - CHAP

T1 - Conductive Atomic-Force Microscopy Investigation of Nanostructures in Microelectronics

AU - Teichert, Christian

AU - Beinik, Igor

PY - 2011

Y1 - 2011

U2 - 10.1007/978-3-642-10497-8_23

DO - 10.1007/978-3-642-10497-8_23

M3 - Chapter

SP - 691

EP - 721

BT - Scanning Probe Microscopy in Nanoscience and Nanotechnology 2

ER -