Conductive Atomic-Force Microscopy Investigation of Nanostructures in Microelectronics

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Authors

Translated title of the contribution	Conductive Atomic-Force Microscopy Investigation of Nanostructures in Microelectronics
Original language	English
Title of host publication	Scanning Probe Microscopy in Nanoscience and Nanotechnology 2
Pages	691-721
DOIs	https://doi.org/10.1007/978-3-642-10497-8_23
Publication status	Published - 2011