Chemistry and microstructure of PLD (Ti,Al)CxN1-x coatings deposited at room temperature
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| Translated title of the contribution | Chemistry and microstructure of PLD (Ti,Al)CxN1-x coatings deposited at room temperature |
|---|---|
| Original language | English |
| Pages (from-to) | 1469-1471 |
| Journal | Applied physics / A (Series A, Materials science & processing) |
| Volume | 79 |
| Publication status | Published - 2004 |
