Characterization of silicon gate oxides by conducting atomic-force microscopy
Research output: Contribution to journal › Article › Research › peer-review
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| Translated title of the contribution | Characterization of silicon gate oxides by conducting atomic-force microscopy |
|---|---|
| Original language | English |
| Pages (from-to) | 168-172 |
| Journal | Surface and interface analysis |
| Volume | 33 |
| DOIs | |
| Publication status | Published - 2002 |
