C2H6 as precursor for low pressure chemical vapor deposition of TiCNB hard coatings

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Authors

Translated title of the contribution	C2H6 as precursor for low pressure chemical vapor deposition of TiCNB hard coatings
Original language	English
Pages (from-to)	127-132
Journal	Surface & coatings technology
Volume	215
DOIs	https://doi.org/10.1016/j.surfcoat.2012.08.081
Publication status	Published - 2013