Aerosol-assisted CVD of thioether-functionalised indium aminoalkoxides
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In: Monatshefte fur Chemie, Vol. 148.2017, No. 8, 02.06.2017, p. 1385-1392.
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TY - JOUR
T1 - Aerosol-assisted CVD of thioether-functionalised indium aminoalkoxides
AU - Biegger, Felix
AU - Jungwirth, Felix
AU - Seifner, Michael Stanislaus
AU - Rameshan, Christoph
AU - Barth, Sven
N1 - Publisher Copyright: © 2017, The Author(s).
PY - 2017/6/2
Y1 - 2017/6/2
N2 - Thioether-functionalised indium aminoalcoholates have been used as single-source precursors in aerosol-assisted CVD processes. The obtained In2O3−x S x oxysulphide deposits show either a single indium sulphide phase for deposits with high sulphide content [>75% (S/(S + O)) for the t-butyl derivatives] or pronounced phase separation in indium oxide and indium sulphide for lower sulphide content [
AB - Thioether-functionalised indium aminoalcoholates have been used as single-source precursors in aerosol-assisted CVD processes. The obtained In2O3−x S x oxysulphide deposits show either a single indium sulphide phase for deposits with high sulphide content [>75% (S/(S + O)) for the t-butyl derivatives] or pronounced phase separation in indium oxide and indium sulphide for lower sulphide content [
KW - AACVD
KW - Indium aminoalcoholates
KW - Nanowires
KW - Oxysulphides
KW - Thin films
UR - http://www.scopus.com/inward/record.url?scp=85020063212&partnerID=8YFLogxK
U2 - 10.1007/s00706-017-1980-2
DO - 10.1007/s00706-017-1980-2
M3 - Article
AN - SCOPUS:85020063212
VL - 148.2017
SP - 1385
EP - 1392
JO - Monatshefte fur Chemie
JF - Monatshefte fur Chemie
SN - 0026-9247
IS - 8
ER -
