Aerosol-assisted CVD of thioether-functionalised indium aminoalkoxides

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Authors

External Organisational units

  • Institute of Materials Science and Technology

Abstract

Thioether-functionalised indium aminoalcoholates have been used as single-source precursors in aerosol-assisted CVD processes. The obtained In2O3−x S x oxysulphide deposits show either a single indium sulphide phase for deposits with high sulphide content [>75% (S/(S + O)) for the t-butyl derivatives] or pronounced phase separation in indium oxide and indium sulphide for lower sulphide content [

Details

Original languageEnglish
Pages (from-to)1385-1392
Number of pages8
JournalMonatshefte fur Chemie
Volume148.2017
Issue number8
DOIs
Publication statusPublished - 2 Jun 2017
Externally publishedYes