Aerosol-assisted CVD of thioether-functionalised indium aminoalkoxides
Research output: Contribution to journal › Article › Research › peer-review
Authors
External Organisational units
- Institute of Materials Science and Technology
Abstract
Thioether-functionalised indium aminoalcoholates have been used as single-source precursors in aerosol-assisted CVD processes. The obtained In2O3−x S x oxysulphide deposits show either a single indium sulphide phase for deposits with high sulphide content [>75% (S/(S + O)) for the t-butyl derivatives] or pronounced phase separation in indium oxide and indium sulphide for lower sulphide content [
Details
Original language | English |
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Pages (from-to) | 1385-1392 |
Number of pages | 8 |
Journal | Monatshefte fur Chemie |
Volume | 148.2017 |
Issue number | 8 |
DOIs | |
Publication status | Published - 2 Jun 2017 |
Externally published | Yes |