A Capacitance Ultrasonic Transducer with Micromaschined Backplate for Fast Flow-Measurements in Hot Pulsating Gases
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| Translated title of the contribution | A Capacitance Ultrasonic Transducer with Micromaschined Backplate for Fast Flow-Measurements in Hot Pulsating Gases |
|---|---|
| Original language | English |
| Pages (from-to) | 898-905 |
| Journal | IEEE sensors journal |
| Volume | VOL. 6 |
| Publication status | Published - 2006 |
