A capacitance ultrasonic transducer with micromachined backplate for fast flow measurements in hot pulsating gases
Research output: Contribution to journal › Article › Research › peer-review
Authors
Organisational units
External Organisational units
- Institute of Materials Science and Technology
- Preparatory Commission for the Comprehensive Nuclear-Test-Ban Treaty Organization
- Stanford University
- Institute of Electrical and Electronics Engineers
Details
| Original language | English |
|---|---|
| Article number | 1661569 |
| Pages (from-to) | 898-905 |
| Number of pages | 8 |
| Journal | IEEE sensors journal |
| Volume | 6 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 1 Aug 2006 |
