Sputter deposition of Mo-based multicomponent thin films from rotary targets: experiment and simulation
Activity: Talk or presentation › Invited talk
Participants
- Martin Rausch - Speaker
- Márius Pavlovic - contributor
- Patrice Kreiml - contributor
- Megan J. Cordill - contributor
- Jörg Winkler - contributor
- Christian Mitterer - contributor
Date
2018
Martin Rausch - Speaker
Márius Pavlovic - contributor
Patrice Kreiml - contributor
Megan J. Cordill - contributor
Jörg Winkler - contributor
Christian Mitterer - contributor
2018
Event (Conference)
| Title | PSE 2018 |
|---|---|
| Period | 17/09/18 → 21/09/18 |
