Thermal stability of magnetron sputtered Zr–Si–N films

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Standard

Thermal stability of magnetron sputtered Zr–Si–N films. / Daniel, R.; Musil, J.; Zeman, P. et al.
in: Surface & coatings technology, Jahrgang 201, 2006, S. 3368-3376.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Vancouver

Daniel R, Musil J, Zeman P, Mitterer C. Thermal stability of magnetron sputtered Zr–Si–N films. Surface & coatings technology. 2006;201:3368-3376. doi: 10.1016/j.surfcoat.2006.07.206, 10.1016/j.surfcoat.2006.07.206

Author

Daniel, R. ; Musil, J. ; Zeman, P. et al. / Thermal stability of magnetron sputtered Zr–Si–N films. in: Surface & coatings technology. 2006 ; Jahrgang 201. S. 3368-3376.

Bibtex - Download

@article{24c58b484b1541e1b9b553d63f8efe49,
title = "Thermal stability of magnetron sputtered Zr–Si–N films",
author = "R. Daniel and J. Musil and P. Zeman and C. Mitterer",
year = "2006",
doi = "10.1016/j.surfcoat.2006.07.206",
language = "English",
volume = "201",
pages = "3368--3376",
journal = "Surface & coatings technology",
issn = "0257-8972",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Thermal stability of magnetron sputtered Zr–Si–N films

AU - Daniel, R.

AU - Musil, J.

AU - Zeman, P.

AU - Mitterer, C.

PY - 2006

Y1 - 2006

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-33750973045&partnerID=MN8TOARS

U2 - 10.1016/j.surfcoat.2006.07.206

DO - 10.1016/j.surfcoat.2006.07.206

M3 - Article

VL - 201

SP - 3368

EP - 3376

JO - Surface & coatings technology

JF - Surface & coatings technology

SN - 0257-8972

ER -