Thermal stability of magnetron sputtered Zr–Si–N films
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
Standard
Thermal stability of magnetron sputtered Zr–Si–N films. / Daniel, R.; Musil, J.; Zeman, P. et al.
in: Surface & coatings technology, Jahrgang 201, 2006, S. 3368-3376.
in: Surface & coatings technology, Jahrgang 201, 2006, S. 3368-3376.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
Harvard
Daniel, R, Musil, J, Zeman, P & Mitterer, C 2006, 'Thermal stability of magnetron sputtered Zr–Si–N films', Surface & coatings technology, Jg. 201, S. 3368-3376. https://doi.org/10.1016/j.surfcoat.2006.07.206, https://doi.org/10.1016/j.surfcoat.2006.07.206
APA
Daniel, R., Musil, J., Zeman, P., & Mitterer, C. (2006). Thermal stability of magnetron sputtered Zr–Si–N films. Surface & coatings technology, 201, 3368-3376. https://doi.org/10.1016/j.surfcoat.2006.07.206, https://doi.org/10.1016/j.surfcoat.2006.07.206
Vancouver
Daniel R, Musil J, Zeman P, Mitterer C. Thermal stability of magnetron sputtered Zr–Si–N films. Surface & coatings technology. 2006;201:3368-3376. doi: 10.1016/j.surfcoat.2006.07.206, 10.1016/j.surfcoat.2006.07.206
Author
Bibtex - Download
@article{24c58b484b1541e1b9b553d63f8efe49,
title = "Thermal stability of magnetron sputtered Zr–Si–N films",
author = "R. Daniel and J. Musil and P. Zeman and C. Mitterer",
year = "2006",
doi = "10.1016/j.surfcoat.2006.07.206",
language = "English",
volume = "201",
pages = "3368--3376",
journal = "Surface & coatings technology",
issn = "0257-8972",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Thermal stability of magnetron sputtered Zr–Si–N films
AU - Daniel, R.
AU - Musil, J.
AU - Zeman, P.
AU - Mitterer, C.
PY - 2006
Y1 - 2006
UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-33750973045&partnerID=MN8TOARS
U2 - 10.1016/j.surfcoat.2006.07.206
DO - 10.1016/j.surfcoat.2006.07.206
M3 - Article
VL - 201
SP - 3368
EP - 3376
JO - Surface & coatings technology
JF - Surface & coatings technology
SN - 0257-8972
ER -
