The sputter performance of an industrial-scale planar Mo-target over ist lifetime: Target erosion and film properties

Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)

Standard

The sputter performance of an industrial-scale planar Mo-target over ist lifetime: Target erosion and film properties. / Rausch, Martin; Sabag, Asaf; Pichler, Karl-Heinz et al.
in: Surface & coatings technology, Jahrgang 381.2020, Nr. 15 January, 125174, 2019.

Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)

Harvard

Rausch, M, Sabag, A, Pichler, K-H, Gruber, G, Köstenbauer, J, Köstenbauer, H, Kreiml, P, Cordill, MJ, Winkler, J & Mitterer, C 2019, 'The sputter performance of an industrial-scale planar Mo-target over ist lifetime: Target erosion and film properties', Surface & coatings technology, Jg. 381.2020, Nr. 15 January, 125174. https://doi.org/10.1016/j.surfcoat.2019.125174

APA

Rausch, M., Sabag, A., Pichler, K.-H., Gruber, G., Köstenbauer, J., Köstenbauer, H., Kreiml, P., Cordill, M. J., Winkler, J., & Mitterer, C. (2019). The sputter performance of an industrial-scale planar Mo-target over ist lifetime: Target erosion and film properties. Surface & coatings technology, 381.2020(15 January), Artikel 125174. https://doi.org/10.1016/j.surfcoat.2019.125174

Vancouver

Rausch M, Sabag A, Pichler KH, Gruber G, Köstenbauer J, Köstenbauer H et al. The sputter performance of an industrial-scale planar Mo-target over ist lifetime: Target erosion and film properties. Surface & coatings technology. 2019;381.2020(15 January):125174. Epub 2019 Nov 18. doi: 10.1016/j.surfcoat.2019.125174

Author

Rausch, Martin ; Sabag, Asaf ; Pichler, Karl-Heinz et al. / The sputter performance of an industrial-scale planar Mo-target over ist lifetime : Target erosion and film properties. in: Surface & coatings technology. 2019 ; Jahrgang 381.2020, Nr. 15 January.

Bibtex - Download

@article{b38ea8625de8461da41494d40badead3,
title = "The sputter performance of an industrial-scale planar Mo-target over ist lifetime: Target erosion and film properties",
author = "Martin Rausch and Asaf Sabag and Karl-Heinz Pichler and Georg Gruber and Judith K{\"o}stenbauer and Harald K{\"o}stenbauer and Patrice Kreiml and Cordill, {Megan J.} and J{\"o}rg Winkler and Christian Mitterer",
year = "2019",
doi = "10.1016/j.surfcoat.2019.125174",
language = "English",
volume = "381.2020",
journal = "Surface & coatings technology",
issn = "0257-8972",
publisher = "Elsevier",
number = "15 January",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - The sputter performance of an industrial-scale planar Mo-target over ist lifetime

T2 - Target erosion and film properties

AU - Rausch, Martin

AU - Sabag, Asaf

AU - Pichler, Karl-Heinz

AU - Gruber, Georg

AU - Köstenbauer, Judith

AU - Köstenbauer, Harald

AU - Kreiml, Patrice

AU - Cordill, Megan J.

AU - Winkler, Jörg

AU - Mitterer, Christian

PY - 2019

Y1 - 2019

U2 - 10.1016/j.surfcoat.2019.125174

DO - 10.1016/j.surfcoat.2019.125174

M3 - Article

VL - 381.2020

JO - Surface & coatings technology

JF - Surface & coatings technology

SN - 0257-8972

IS - 15 January

M1 - 125174

ER -

Beziehungsdiagramm anzeigen

360 Link

Zeitschriften in BUGL

Vom selben Autor

Mehr zeigen