The femtosecond laser micro-processing of the field-emission tip arrays in single crystal CeB6

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Autoren

  • Ning Zhou
  • Wei Zhang
  • Xin Zhang
  • Hongliang Liu
  • Qingmei Liu
  • Yixin Xiao
  • Yanqin Liu
  • Ning Liao

Externe Organisationseinheiten

  • Beijing University of Technology
  • Beijing Research Institute of Aviation Engineering
  • Wuhan University of Science and Technology
  • Anyang Institute of Technology

Abstract

The field-emission tip arrays (FEAs) in single crystal cerium-hexaboride (CeB 6) were micro-processed by femtosecond laser. The results show that the femtosecond laser has no damage to the surface structure and phase of the CeB 6 FEAs, and the FEA with the curvature radius of the optimal tips of about 0.6 μm and the height of about 5 μm have uniform morphology and the best field-emission performance. The single crystal CeB 6 FEAs had good emission stability under the following conditions: the starting electric field of 2.8 V/μm and an emission current density of 0.98 A/cm 2 at an electric field of 7.7 V/μm. The calculations of material removal threshold and finite element simulation of the temperature field substantiate that laser peak energy density F 0=0.95 J/cm 2 is in good agreement with the theoretical calculation result (0.51 J/cm 2≤F 0 ≤ 2.12 J/cm 2). Finally, the best process parameter range of this experiment is obtained. These results further indicating that the femtosecond laser micro-processing is an effective method to develop the vacuum field-emission application of single crystal CeB 6.

Details

OriginalspracheEnglisch
Aufsatznummer109929
Seitenumfang8
FachzeitschriftVacuum
Jahrgang184
DOIs
StatusVeröffentlicht - Feb. 2021