The effect of the discharge power on target poisoning and microstructure - property relations of reactively sputtered TiN coatings
Publikationen: Konferenzbeitrag › Poster › Forschung
Standard
The effect of the discharge power on target poisoning and microstructure - property relations of reactively sputtered TiN coatings. / Saringer, Christian; Franz, Robert; Zorn, Katrin et al.
2015. Postersitzung präsentiert bei MIATEC RSD 2015, Paris, Frankreich.
2015. Postersitzung präsentiert bei MIATEC RSD 2015, Paris, Frankreich.
Publikationen: Konferenzbeitrag › Poster › Forschung
Harvard
Saringer, C, Franz, R, Zorn, K & Mitterer, C 2015, 'The effect of the discharge power on target poisoning and microstructure - property relations of reactively sputtered TiN coatings', MIATEC RSD 2015, Paris, Frankreich, 8/12/15 - 11/12/15.
APA
Saringer, C., Franz, R., Zorn, K., & Mitterer, C. (2015). The effect of the discharge power on target poisoning and microstructure - property relations of reactively sputtered TiN coatings. Postersitzung präsentiert bei MIATEC RSD 2015, Paris, Frankreich.
Vancouver
Saringer C, Franz R, Zorn K, Mitterer C. The effect of the discharge power on target poisoning and microstructure - property relations of reactively sputtered TiN coatings. 2015. Postersitzung präsentiert bei MIATEC RSD 2015, Paris, Frankreich.
Author
Bibtex - Download
@conference{e8e82d486b38494ea32883fbacd178dc,
title = "The effect of the discharge power on target poisoning and microstructure - property relations of reactively sputtered TiN coatings",
author = "Christian Saringer and Robert Franz and Katrin Zorn and Christian Mitterer",
year = "2015",
month = dec,
language = "English",
note = "MIATEC RSD 2015 ; Conference date: 08-12-2015 Through 11-12-2015",
}
RIS (suitable for import to EndNote) - Download
TY - CONF
T1 - The effect of the discharge power on target poisoning and microstructure - property relations of reactively sputtered TiN coatings
AU - Saringer, Christian
AU - Franz, Robert
AU - Zorn, Katrin
AU - Mitterer, Christian
PY - 2015/12
Y1 - 2015/12
M3 - Poster
T2 - MIATEC RSD 2015
Y2 - 8 December 2015 through 11 December 2015
ER -
